實驗室名稱 微光機電系統設計實驗室
位置 電機二館307A室
研究方向 Our group focuses on the design, simulation, fabrication, and testing of MEMS devices and systems.
Recent topics include:
  1. Cantilever sensors
  2. Micro mirrors
  3. Micro grippers
  4. Accelerometers
  5. Micro actuators
>
設備 Design and simulation softwares :
  1. ANSYS
  2. SolidWorks
  3. L-Edit
  4. FRED
Major equipments:
  1. Microscopes
  2. Probe station
  3. He-Ne laser
  4. Laser beam position sensing detector (PSD)
  5. DC power supplies
  6. Power amplifier
  7. Oscilloscope
  8. Function generators
分機 +886-2-33669838