Lab Title Micro-Opto-Electro-Mechanical Systems Design Laboratory
Location R307A, EE BuildingⅡ
Research Direction Our group focuses on the design, simulation, fabrication, and testing of MEMS devices and systems.
Recent topics include:
  1. Cantilever sensors
  2. Micro mirrors
  3. Micro grippers
  4. Accelerometers
  5. Micro actuators
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Facility Design and simulation softwares :
  1. ANSYS
  2. SolidWorks
  3. L-Edit
  4. FRED
Major equipments:
  1. Microscopes
  2. Probe station
  3. He-Ne laser
  4. Laser beam position sensing detector (PSD)
  5. DC power supplies
  6. Power amplifier
  7. Oscilloscope
  8. Function generators
Extension Number +886-2-33669838