Ultrafast Laser Microfabrication for Microsystems with Complex 3D Structures and Advanced Materials
Title:
Ultrafast Laser Microfabrication for Microsystems with Complex 3D Structures and Advanced Materials
Abstract:
The performance and functionality of microsystems are fundamentally shaped by the capabilities of microfabrication technologies. Over the past two decades, ultrafast laser-based fabrication has emerged as a powerful enabler for realizing microsystems with features beyond the reach of conventional semiconductor processes. The unique advantage of ultrafast lasers lies in their ultrashort pulse durations, which enable highly localized multiphoton absorption with minimal thermal effects. This nonlinear absorption can induce a range of material modifications, making ultrafast lasers suitable for both additive and subtractive microfabrication. The versatility of ultrafast laser processing has shown great promise in advancing microsystem performance. Key applications include: (1) multiphoton crosslinking for 3D printing with unmatched patterning freedom and nanoscale resolution; (2) laser-induced self-organization for fabricating multifunctional sub-wavelength structures in solids; and (3) multiphoton ablation for precision structuring of a broad range of materials on non-traditional substrates. In this talk, I will introduce the principles of ultrafast lasers and multiphoton absorption, followed by recent developments in the abovementioned applications, particularly drawing on my own research experience, to demonstrate their impact on microsystem fabrication.
Short Bio:
Dr. Huang is an Assistant Professor in the Department of Power Mechanical Engineering at National Tsing Hua University. He received his Ph.D. in Electrical Engineering (Micro and Nanosystems) in 2024 and M.Sc. in Engineering Physics (Nanotechnology) in 2019, both from KTH Royal Institute of Technology, Sweden. He has received the “Emerging Young Scholar” grant (2030 Cross-Generation Program) and the “Yushan Young Fellow” award from Taiwan’s National Science and Technology Council and Ministry of Education, respectively, in 2025. His research interests include ultrafast laser microfabrication, 3D printing, MEMS, micro-optics, photonic integrated circuits, optical sensing, glass and 2D materials, and micro-supercapacitors.
Students who take the "Colloquium" course must attend.
