Our group focuses on the design, simulation, fabrication, and testing of MEMS devices and systems. Recent topics include: 1.Cantilever sensors 2.Micro mirrors 3.Micro grippers 4.Accelerometers 5.Micro actuators
主要設備
Design and simulation softwares : 1.ANSYS 2.SolidWorks 3.L-Edit 4.FRED Major equipments: 1.Microscopes 2.Probe station 3.He-Ne laser 4.Laser beam position sensing detector (PSD) 5.DC power supplies 6.Power amplifier 7.Oscilloscope 8.Function generators
