Clean RoomAn optoelectronics process laboratory, blueprinted and managed by the Graduate Institute of Photonics and Optoelectronics, is constructed in January 2008. This clean room laboratory is located at Room 331, Electrical Engineering BuildingⅡ, occupying a total area of 114.6 m2. A compartment of 12.5m2 is designated for the yellow room. The process laboratory, including all its facilities, is open to all faculty members and researchers at National Taiwan University. The facilities include, but are not limited to, dielectric E-gun, metal RIE, sputter evaporator, mask aligner, RTA, surface profiler, etc.
E-beam, RTP, RIE, Sputter, E-gum, RTA, UZ Ozone, SpinCoater